NM3AD?xx
DC superposition type automatic matching device
사양 소개
| 通過RF電力 | 1000W 200W 3000W |
|---|---|
| frequency | 13.56MHz |
| AC input | AC100～200[V] 1φ |
| variable capacitor | vacuum variable capacitor |
| input impedance | 50Ω |
| cooling method | Combined air cooling and water cooling |
| RF input connector | HN type |
| RF output | copper plate output |
| External dimensions | DXXX×WXXX×HXXX |